This content will become publicly available on April 7, 2023
Conformal coating of nanopores with functional polymer nanolayers is the key to many emerging technologies such as miniature sensors and membranes for advanced molecular separations. While the polymer coatings are often used to introduce functional moieties, their controlled growth under nanoconfinement could serve as a new approach to manipulate the size and shape of coated nanopores, hence, enabling novel functions like molecular separation. However, precise control of coating thickness in the longitudinal direction of a nanopore is limited by the lack of a characterization method to profile coating thickness within the nanoconfined space. Here, we report an experimental approach that combines ion milling (IM) and high-resolution field emission scanning electron microscopy (FESEM) for acquiring an accurate depth profile of ultrathin (∼20 nm or less) coatings synthesized inside nanopores via initiated chemical vapor deposition (iCVD). The enhanced capability of this approach stems from the excellent x–y resolution achieved by FESEM (i.e., 4.9 nm/pixel), robust depth ( z) control enabled by IM (step size as small as 100 nm with R2 = 0.992), and the statistical power afforded by high-throughput sampling (i.e., ∼2000 individual pores). With that capability, we were able to determine with unparalleled accuracy and precision the depth profile of coating thickness and iCVD more »
- Publication Date:
- NSF-PAR ID:
- 10365007
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 40
- Issue:
- 3
- Page Range or eLocation-ID:
- Article No. 033406
- ISSN:
- 0734-2101
- Publisher:
- American Vacuum Society
- Sponsoring Org:
- National Science Foundation
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