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Title: Epitaxial growth of wafer-scale transition metal dichalcogenide monolayers by metalorganic chemical vapor deposition
The epitaxial growth of wafer-scale semiconducting TMDs monolayers (MoS 2 , WS 2 , WSe 2 ) on c-plane sapphire by metalorganic chemical vapor deposition (MOCVD) is demonstrated and the resulting structural and optical properties of the films are compared to elucidate trends based on metal and chalcogen species. The sulfur based TMDs exhibit improved epitaxy, fewer defects and increased photoluminescence intensity on sapphire compared to WSe 2 which is attributed to a smaller effective lattice mismatch and improved stability.  more » « less
Award ID(s):
2039351 1539916
NSF-PAR ID:
10412515
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Page Range / eLocation ID:
160 to 162
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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