Liu, Yuncong, Enamul Hoque Yousuf, S M, Qamar, Afzaal, Rais-Zadeh, Mina, and Feng, Philip X.-L. Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators. Retrieved from https://par.nsf.gov/biblio/10427641. Proceedings of 36th IEEE International Conference on Micro Electromechanical Systems (MEMS 2023) . Web. doi:10.1109/MEMS49605.2023.10052273.

Liu, Yuncong, Enamul Hoque Yousuf, S M, Qamar, Afzaal, Rais-Zadeh, Mina, & Feng, Philip X.-L. Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators. Proceedings of 36th IEEE International Conference on Micro Electromechanical Systems (MEMS 2023), (). Retrieved from https://par.nsf.gov/biblio/10427641. https://doi.org/10.1109/MEMS49605.2023.10052273

Liu, Yuncong, Enamul Hoque Yousuf, S M, Qamar, Afzaal, Rais-Zadeh, Mina, and Feng, Philip X.-L. "Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators". Proceedings of 36th IEEE International Conference on Micro Electromechanical Systems (MEMS 2023) (). Country unknown/Code not available. https://doi.org/10.1109/MEMS49605.2023.10052273. https://par.nsf.gov/biblio/10427641.

@article{osti_10427641,
place = {Country unknown/Code not available}, title = {Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators}, url = {https://par.nsf.gov/biblio/10427641}, DOI = {10.1109/MEMS49605.2023.10052273}, abstractNote = {}, journal = {Proceedings of 36th IEEE International Conference on Micro Electromechanical Systems (MEMS 2023)}, author = {Liu, Yuncong and Enamul Hoque Yousuf, S M and Qamar, Afzaal and Rais-Zadeh, Mina and Feng, Philip X.-L.}, }