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Title: Thermogravimetric study of metal–organic precursors and their suitability for hybrid molecular beam epitaxy
Abstract Although metal–organic (MO) precursors are widely used in technologically relevant deposition techniques, reports on their temperature-dependent evaporation and decomposition behaviors are scarce. Here, MO precursors of the metals Ti, V, Al, Hf, Zr, Ge, Ta, and Pt were subjected to thermogravimetric analysis to experimentally determine their vapor pressure curves and to gain insight into their temperature-dependent decomposition kinetics. Benzoic acid was used as a calibration standard and vapor pressure curves were extracted from thermogravimetric measurements using the Langmuir equation. The obtained data is used to discuss the suitability of these MO precursors in chemical vapor deposition-based thin film growth approaches in general, and hybrid molecular beam epitaxy in particular. All MOs, except for Ta- and one Ti-based MOs, were deemed suitable for gas inlet systems. The Ta-based MO demonstrated suitability for an effusion cell, while all MOs showed compatibility with cracker usage. Graphical Abstract  more » « less
Award ID(s):
1905861 2039351
PAR ID:
10481113
Author(s) / Creator(s):
; ;
Publisher / Repository:
Cambridge University Press (CUP)
Date Published:
Journal Name:
Journal of Materials Research
Volume:
39
Issue:
3
ISSN:
0884-2914
Format(s):
Medium: X Size: p. 436-448
Size(s):
p. 436-448
Sponsoring Org:
National Science Foundation
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