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Title: Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias
Award ID(s):
2042154 2039351
PAR ID:
10569203
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
Nature Electronics
Date Published:
Journal Name:
Nature Electronics
Volume:
7
Issue:
10
ISSN:
2520-1131
Page Range / eLocation ID:
892 to 903
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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