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Title: Toward Large-Scale Dynamically Reconfigurable Apertures Using Graphene
We present a novel fabrication technique for large-scale, on-wafer graphene devices. With the proposed technique, large-area graphene apertures can be fabricated, enabling the proliferation of graphene-based reconfigurable devices, including metasurfaces. Such topologies require large-area high yield fabrication processes. To avoid graphene delamination during the chemical processes of the fabrication, we use a titanium sacrificial layer to protect the graphene monolayer. To evaluate the fabrication method, we present broadband in-plane graphene measurements in the 220-330 GHz band for the first time and compare the measured resistance sheet with previous works.
Award ID(s):
Publication Date:
Journal Name:
2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting
Page Range or eLocation-ID:
511 to 512
Sponsoring Org:
National Science Foundation
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