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Freeform optical components enable dramatic advances for optical systems in both performance and packaging. Surface form metrology of manufactured freeform optics remains a challenge and an active area of research. Towards addressing this challenge, we previously reported on a novel architecture, cascade optical coherence tomography (C-OCT), which was validated for its ability of high-precision sag measurement at a given point. Here, we demonstrate freeform surface measurements, enabled by the development of a custom optical-relay-based scanning mechanism and a unique high-speed rotation mechanism. Experimental results on a flat mirror demonstrate an RMS flatness of 14 nm (∼λ/44 at the He-Ne wavelength). Measurement on a freeform mirror is achieved with an RMS residual of 69 nm (∼λ/9). The system-level investigations and validation provide the groundwork for advancing C-OCT as a viable freeform metrology technique.
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Cascade optical coherence tomography (C-OCT)
Significant advances for optical systems in terms of both performance and packaging are enabled by freeform optical components. Yet, surface form metrology for freeform optics remains a challenge. We developed and investigated a point-cloud cascade optical coherence tomography (C-OCT) technique to address this metrology challenge. The mathematical framework for the working principle of C-OCT is presented. A novel detection scheme is developed to enable high-speed measurements. Experimental results validate the C-OCT technique with the prototype setup demonstrating single-point precision of ±26 nm (∼λ/24 at the He-Ne wavelength), paving the way towards full surface measurements on freeform optical components.
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- PAR ID:
- 10163972
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 28
- Issue:
- 14
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 19937
- Size(s):
- Article No. 19937
- Sponsoring Org:
- National Science Foundation
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