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Significant advances for optical systems in terms of both performance and packaging are enabled by freeform optical components. Yet, surface form metrology for freeform optics remains a challenge. We developed and investigated a point-cloud cascade optical coherence tomography (C-OCT) technique to address this metrology challenge. The mathematical framework for the working principle of C-OCT is presented. A novel detection scheme is developed to enable high-speed measurements. Experimental results validate the C-OCT technique with the prototype setup demonstrating single-point precision of ±26 nm (∼λ/24 at the He-Ne wavelength), paving the way towards full surface measurements on freeform optical components.
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Verification of cascade optical coherence tomography for freeform optics form metrology
Freeform optical components enable dramatic advances for optical systems in both performance and packaging. Surface form metrology of manufactured freeform optics remains a challenge and an active area of research. Towards addressing this challenge, we previously reported on a novel architecture, cascade optical coherence tomography (C-OCT), which was validated for its ability of high-precision sag measurement at a given point. Here, we demonstrate freeform surface measurements, enabled by the development of a custom optical-relay-based scanning mechanism and a unique high-speed rotation mechanism. Experimental results on a flat mirror demonstrate an RMS flatness of 14 nm (∼λ/44 at the He-Ne wavelength). Measurement on a freeform mirror is achieved with an RMS residual of 69 nm (∼λ/9). The system-level investigations and validation provide the groundwork for advancing C-OCT as a viable freeform metrology technique.
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- PAR ID:
- 10216358
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 29
- Issue:
- 6
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 8542
- Size(s):
- Article No. 8542
- Sponsoring Org:
- National Science Foundation
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