Cavities fabricated on the microscale have a wide variety of applications, from microwells for cell cultures, microfluidic channels for drug delivery systems to waveguide structures for RF applications. Micro-cavities are particularly useful for sensing applications, such as cavity-based pressure sensors and gap-based capacitive sensors. Cavity structures have been widely demonstrated in MEMS devices using typical semiconductor processing. However, the development of similar structures for flexible applications poses additional challenges. While flexible cavity structures have been fabricated in laboratory environments, challenges arise when these structures are integrated into a larger flexible sensing device or flexible hybrid electronics system. An additive manufacturing approach to cavity formation is presented which utilizes a 3D screen-printing process and in-situ cure. Patterned micro-structures are formed by building up layers of dielectric ink interspersed as needed with printed conductive traces. A proof-of-concept microfluidic channel-based capacitor is fabricated to demonstrate the potential sensing applications for the fabricated microcavities.
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Continuous Three-Dimensional Printing of Architected Piezoelectric Sensors in Minutes
Additive manufacturing (AM), also known as three-dimensional (3D) printing, is thriving as an effective and robust method in fabricating architected piezoelectric structures, yet most of the commonly adopted printing techniques often face the inherent speed-accuracy trade-off, limiting their speed in manufacturing sophisticated parts containing micro-/nanoscale features. Herein, stabilized, photo-curable resins comprising chemically functionalized piezoelectric nanoparticles (PiezoNPs) were formulated, from which microscale architected 3D piezoelectric structures were printed continuously via micro continuous liquid interface production ( μ CLIP) at speeds of up to ~60 μ m s -1 , which are more than 10 times faster than the previously reported stereolithography-based works. The 3D-printed functionalized barium titanate (f-BTO) composites reveal a bulk piezoelectric charge constant d 33 of 27.70 pC N -1 with the 30 wt% f-BTO. Moreover, rationally designed lattice structures that manifested enhanced, tailorable piezoelectric sensing performance as well as mechanical flexibility were tested and explored in diverse flexible and wearable self-powered sensing applications, e.g., motion recognition and respiratory monitoring.
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- Award ID(s):
- 1828010
- PAR ID:
- 10345488
- Date Published:
- Journal Name:
- Research
- Volume:
- 2022
- ISSN:
- 2639-5274
- Page Range / eLocation ID:
- 1 to 13
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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