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Title: Quasi-monolithic heterodyne laser interferometer for inertial sensing

We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of11pm/Hzat100mHzand as low as0.6pm/Hzabove1pm. The prototype unit is20mm×<#comment/>20mm×<#comment/>10mmin size and weighs4.5g, allowing subsequent integration in compact systems.

 
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Award ID(s):
2045579
NSF-PAR ID:
10372748
Author(s) / Creator(s):
;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optics Letters
Volume:
47
Issue:
19
ISSN:
0146-9592; OPLEDP
Page Range / eLocation ID:
Article No. 5120
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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