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We report the simulation of an adaptive interferometric null test using a high-definition phase-only spatial light modulator (SLM) to measure form and mid spatial frequencies of a freeform mirror with a sag departure of 150 μm from its base sphere. A state-of-the-art commercial SLM is modeled as a reconfigurable phase computer generated hologram (CGH) that generates a nulling phase function with close to an order of magnitude higher amplitude than deformable mirrors. The theoretical uncertainty in form measurement arising from pixelation and phase quantization of the SLM is 50.62 nm RMS. The calibration requirements for hardware implementation are detailed. © 2019 Optical Society of America https://doi.org/10.1364/OL.44.002000
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Implementation of a null test for freeform optics using a high-definition spatial light modulator
We report the implementation of an interferometric null test using a high-definition spatial light modulator (SLM) as a reconfigurable alternative to a computer-generated hologram. We detail the alignment process chain, including novel techniques using the SLM to project alignment fiducials on the test part. To validate the alignment protocol, we measure a mild off-axis conic with the SLM-based system and cross-validate with conventional interferometry within 30 nm root-mean-square (RMS) surface figure. Finally, we report the null test of a 65 mm clear aperture concave freeform with 91 μm peak-valley sag departure from the base sphere. The measured surface figure of the freeform is within 40 nm RMS compared to the measurement with a commercial metrology instrument.
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- PAR ID:
- 10429445
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 30
- Issue:
- 24
- ISSN:
- 1094-4087
- Page Range / eLocation ID:
- 43938
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript
- Journal Article:
- https://doi.org/10.1364/OE.473853
