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Abstract Biomorph actuators composed of two layers with asymmetric thermal expansion properties are widely explored owing to their high mechanical adaptability. Electrothermal nanomaterials are employed as the Joule heating components in them for controlled thermal expansion, while their large integration thickness often limits resulting actuation performances. This study reports high‐performance ultrathin soft biomorph actuators enabled by near atom‐thickness 2D platinum ditelluride (PtTe2) layers—a new class of emergent metallic 2D transition metal dichalcogenides. The actuators employ wafer‐scale 2D PtTe2layers sandwiched in between two polymer films of largely mismatched thermal expansion coefficients, which are electrically biased to generate Joule heating. This electrical‐to‐thermal conversion causes the asymmetric expansion of the polymers achieving outstanding actuation motions; i.e., large bending curvature, fast responsiveness, as well as high reversibility and endurance, which surpass the performances of previously explored graphene‐based actuators with much smaller dimensions. Furthermore, the 2D PtTe2layers‐enabled actuators are demonstrated to function as soft grippers in lifting and relocating heavier objects, implying the great potential of near atom‐thickness materials in biomimetic devices.
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Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms
Abstract Bending and folding techniques such as origami and kirigami enable the scale‐invariant design of 3D structures, metamaterials, and robots from 2D starting materials. These design principles are especially valuable for small systems because most micro‐ and nanofabrication involves lithographic patterning of planar materials. Ultrathin films of inorganic materials serve as an ideal substrate for the fabrication of flexible microsystems because they possess high intrinsic strength, are not susceptible to plasticity, and are easily integrated into microfabrication processes. Here, atomic layer deposition (ALD) is employed to synthesize films down to 2 nm thickness to create membranes, metamaterials, and machines with micrometer‐scale dimensions. Two materials are studied as model systems: ultrathin SiO2and Pt. In this thickness limit, ALD films of these materials behave elastically and can be fabricated with fJ‐scale bending stiffnesses. Further, ALD membranes are utilized to design micrometer‐scale mechanical metamaterials and magnetically actuated 3D devices. These results establish thin ALD films as a scalable basis for micrometer‐scale actuators and robotics.
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- Award ID(s):
- 1719875
- PAR ID:
- 10458363
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials
- Volume:
- 31
- Issue:
- 29
- ISSN:
- 0935-9648
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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