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A theoretical model that can be used to simultaneously fit the I–V characteristics and spectral optical responsivity of Ge-like pin diodes is described in detail and validated experimentally using specially fabricated Ge- and Ge1−ySny devices. The model combines a numerical solution of the basic semiconductor transport equations with a rigorous calculation of the optical generation rate that accounts for multiple reflections in the device structure multilayers. The results can be used to quantify the reduction of photocurrent associated with recombination centers for full optimization of the device structure. 

A practical quantitative model is presented to account for the I–V characteristics of pin diodes based on epitaxial Ge-like materials. The model can be used to quantify how the different material properties and recombination mechanisms affect the diode performance. The importance of dislocations, non-passivated defects, and residual intrinsic layer doping in determining the qualitative shape of the I–V curves is discussed in detail. Examples are shown covering literature diodes as well as diodes fabricated with the purpose of validating the theoretical effort. 

We report the synthesis of Ge1−ySny films containing 6%–13% Sn directly on Si(100) for monolithic integration applications, circumventing the use of conventional Ge-buffer layers. The films are produced in a gas source molecular epitaxy chamber at ultralow temperatures of 185–210 °C and a pressure of 10−5 Torr by the reactions of pure vapor Ge4H10 and SnD4 or SnH4 without carrier gases. Very small amounts of Si, incorporated via the Si4H10 precursor, can be used to improve the structural properties. All samples were characterized by XRD, RBS, IR-ellipsometry, AFM, and TEM, indicating the formation of monocrystalline single-phase films with relatively low defectivity and flat surfaces. A notable highlight is that the residual strains of the alloy layers are much lower compared to those grown on Ge buffers and can be further reduced by rapid thermal annealing without decomposition, indicating that growth on bare silicon should produce bulklike, high Sn content alloys that cannot be accessed using Ge buffers. N-type analogs of the above samples doped with phosphorus were also produced using P(SiH3)3 as the in situ dopant precursor. The results collectively illustrate the potential of our chemistry-based method to generate good quality Ge1−ySny layers directly on large area Si wafers bypassing Ge buffers that typically lead to complications such as multiple hetero-interfaces and epitaxial breakdown at high Sn concentrations. 

We describe an alternative strategy to the fabrication of Ge–Sn based materials on Si by using chlorogermane (GeH 3 Cl) instead of the specialty Ge hydrides (Ge 2 H 6 , Ge 3 H 8 , Ge 4 H 10 ) currently employed as ultra-low temperature sources of Ge. This simpler and potentially more practical chlorinated derivative is obtained in high yields and in research-grade purity by direct reactions of commercial GeH 4 and SnCl 4 and exhibits favorable physical and chemical properties that make it an effective source of Ge for a wide range of chemical vapor deposition (CVD) processing conditions. As a proof-of concept, we have employed GeH 3 Cl to demonstrate deposition of pure Ge and GeSn hetero-structures on large-area Si wafers, at conditions compatible with current specialty methods for next generation technologies but with higher deposition efficiency, ensuring an optimal use of the Ge feedstock. In the case of pure Ge, GeH 3 Cl has enabled growth of thick and uniform Ge layers with flat surfaces and relaxed microstructures at 330–360 °C, exhibiting lower residual doping than obtained by alternate Ge hydride methods. GeH 3 Cl allows for in situ doping with the same facility as the Ge hydrides, and this has enabled the design and fabrication of homo-structure pin photodetectors exhibiting low dark current densities and closer to ideal optical collection efficiencies when compared to devices produced by other Ge-on-Si approaches. In the case of GeSn, the high reactivity of GeH 3 Cl toward Sn hydrides has enabled the formation of mono-crystalline alloy layers at ultra-low temperatures between 200–300 °C and conditions akin to molecular beam epitaxy (MBE). Combined, these results suggest an intriguing potential for this new CVD process in the device-application space. The deployment of GeH 3 Cl as a highly reactive low-temperature Ge-source could not only improve on the current wasteful methods that use GeH 4 , but also eliminate the need for the higher-cost polygermanes. 

The temperature dependence of the complex dielectric function [Formula: see text] of bulk Ge near the direct bandgap was investigated with spectroscopic ellipsometry at temperatures between 10 and 710 K. Second derivatives of the dielectric function with respect to energy are obtained using a digital linear filter method. A model that incorporates excitonic effects using the Tanguy model for the Hulthén potential [C. Tanguy, Phys. Rev. B 60, 10660 (1999)] was used to fit the dielectric function and its second derivatives simultaneously. Using [Formula: see text] theory and literature values for effective masses, reasonable agreement with the experiment is obtained for [Formula: see text] up to room temperature using the direct bandgap and its broadening as the only adjustable parameters.