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Thin (40–150 nm), highly doped n+ (1019–1020 cm−3) Ga2O3 layers deposited using pulsed laser deposition (PLD) were incorporated into Ti/Au ohmic contacts on (001) and (010) β-Ga2O3 substrates with carrier concentrations between 2.5 and 5.1 × 1018 cm−3. Specific contact resistivity values were calculated for contact structures both without and with a PLD layer having different thicknesses up to 150 nm. With the exception of a 40 nm PLD layer on the (001) substrate, the specific contact resistivity values decreased with increasing PLD layer thickness: up to 8× on (001) Ga2O3 and up to 16× on (010) Ga2O3 compared with samples without a PLD layer. The lowest average specific contact resistivities were achieved with 150 nm PLD layers: 3.48 × 10−5 Ω cm2 on (001) Ga2O3 and 4.79 × 10−5 Ω cm2 on (010) Ga2O3. Cross-sectional transmission electron microscopy images revealed differences in the microstructure and morphology of the PLD layers on the different substrate orientations. This study describes a low-temperature process that could be used to reduce the contact resistance in Ga2O3 devices.
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This content will become publicly available on December 1, 2025
Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys
Nickel and aluminum ohmic contacts were formed on p-doped GeC and GeCSn epitaxial films with ∼1%C. When a 40 nm p-GeC contact layer was added to p-Ge, annealed contact resistivity (Rc) dropped by 87% to 9.3 × 10−7 Ω cm2 for Al but increased by 32% to 2.9 × 10−5 Ω cm2 for Ni. On the other hand, thick films of GeCSn, which showed lower active doping, had contact resistivities of 4.4 × 10−6 Ω cm2 for Al and 1.4 × 10−5 Ω cm2 for Ni. In general, Al contacts were better than Ni, regardless of anneal, and were further improved by adding carbon. Annealing reduced Rc for both Ni and Al contacts to GeCSn by 4×, 2× for Al on GeC, and 5 orders of magnitude for Ni on GeC. It is speculated that C forms bonds with Ni that inhibit diffusion of Ni into the Ge, thus preventing the formation of low-resistance nickel germanide. Adding C, either as bulk GeCSn or as GeC contact layers, seems to significantly reduce the contact resistivity for Al contacts when compared to bulk Ge of comparable doping.
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- Award ID(s):
- 2122041
- PAR ID:
- 10598292
- Publisher / Repository:
- Journal of Vacuum Science & Technology B
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 42
- Issue:
- 6
- ISSN:
- 2166-2746
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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